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Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

机译:制造集成的高品质因子(高Q)光流控   飞秒激光微加工传感器

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摘要

We report on fabrication of a microtoroid resonator of a high-quality factor(i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition)integrated in a microfluidic channel using femtosecond laser three-dimensional(3D) micromachining. Coupling of light into and out of the microresonator hasbeen realized with a fiber taper that is reliably assembled with themicrotoroid. The assembly of the fiber to the microtoroid is achieved bywelding the fiber taper onto the sidewall of the microtoroid using CO_2 laserirradiation. The integrated microresonator maintains a high Q-factor of3.21x10^5 as measured in air, which should still be sufficient for many sensingapplications. We test the functionality of the integrated optofluidic sensor byperforming bulk refractive index sensing of purified water doped with tinyamount of salt. It is shown that a detection limit of ~1.2x10^-4 refractiveindex unit can be achieved. Our result showcases the capability of integrationof high-Q microresonators with complex microfluidic systems using femtosecondlaser 3D micromachining.
机译:我们报告了使用飞秒激光三维(3D)微加工技术将集成在微流体通道中的高质量因子(即在临界耦合条件下测得的Q因子〜3.24x10 ^ 6)制成的微环形谐振器。已经通过可靠地与微环管组装的光纤锥实现了光入射到微谐振器和从微谐振器出来。光纤到微环的组装是通过使用CO_2激光辐照将光纤锥度焊接到微环的侧壁上来实现的。集成的微谐振器在空气中测得的Q值保持在3.21x10 ^ 5的高水平,对于许多传感应用而言,这仍然足够。我们通过对掺杂有少量盐的纯净水进行体折射率检测来测试集成的光电传感器的功能。结果表明,可以达到〜1.2x10 ^ -4折射率单位的检测极限。我们的结果展示了使用飞秒激光3D微加工将高Q微谐振器与复杂微流体系统集成的能力。

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